Microlithography : (Record no. 47769)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00734nam a2200241u 4500 |
| 001 - CONTROL NUMBER | |
| control field | 00743585 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | PWmBRO |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 850806s1986 nyua b 00110 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0070193045 : |
| Terms of availability | $42.00 |
| 039 0# - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| Level of rules in bibliographic description | 2 |
| Level of effort used to assign nonsubject heading access points | 3 |
| Level of effort used to assign subject headings | 3 |
| Level of effort used to assign classification | 3 |
| Number of fixed field character positions coded | 3 |
| 050 0# - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7874 |
| Item number | .E495 1986 |
| 082 0# - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381/73�19 |
| 090 0# - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) | |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) | 621.381/73/E46m |
| 100 10 - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Elliott, David J. |
| 245 10 - TITLE STATEMENT | |
| Title | Microlithography : |
| Remainder of title | process technology for IC fabrication / |
| Statement of responsibility, etc. | David J. Elliott. |
| 260 0# - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | McGraw-Hill, |
| Date of publication, distribution, etc. | c1986. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xix, 378 p. : |
| Other physical details | ill. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| General subdivision | Very large scale integration |
| -- | Design and construction. |
| Topical term or geographic name entry element | Microlithography. |
| Topical term or geographic name entry element | Photoresists. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| 994 01 - | |
| -- | T1001 060 171 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Permanent Location | Current Location | Shelving location | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Main Collection | Matheson Library | Matheson Library | Main Collection | 621.38173 E46m | 060171 | 2018-03-24 | 2018-03-24 | Books |