Elliott, David J.
Microlithography : process technology for IC fabrication / David J. Elliott. - New York : McGraw-Hill, c1986. - xix, 378 p. : ill.
0070193045 : $42.00
Integrated circuits--Very large scale integration--Design and construction.
Microlithography.
Photoresists.
TK7874 / .E495 1986
621.381/73�19
Microlithography : process technology for IC fabrication / David J. Elliott. - New York : McGraw-Hill, c1986. - xix, 378 p. : ill.
0070193045 : $42.00
Integrated circuits--Very large scale integration--Design and construction.
Microlithography.
Photoresists.
TK7874 / .E495 1986
621.381/73�19