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1.
Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.

by Thompson, L. F, 1944- | Willson, C. G. (C. Grant), 1939- | Bowden, M. J, 1943- | American Chemical Society. Division of Organic Coatings and Plastics Chemistry | American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.).

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Washington, D.C. : The Society, 1983Availability: Items available for loan: Matheson Library [Call number: 686.2315 I61] (1).

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2.
Microlithography : process technology for IC fabrication / David J. Elliott.

by Elliott, David J.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: New York : McGraw-Hill, c1986Availability: Items available for loan: Matheson Library [Call number: 621.38173 E46m] (1).

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