Gise, Peter E. <br/><br/>
Modern semiconductor fabrication technology / 
Peter Gise, Richard Blanchard. 
 - Englewood Cliffs, N.J. :  Prentice-Hall,  c1986. 
 - vii, 264 p. :  ill. 
<br/><br/><label>ISBN: </label>0835946843 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.<br/>Integrated circuits--Design and construction.