Elliott, David J. <br/><br/>
Microlithography :  process technology for IC fabrication / 
David J. Elliott. 
 - New York :  McGraw-Hill,  c1986. 
 - xix, 378 p. :  ill. 
<br/><br/><label>ISBN: </label>0070193045 :  $42.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration--Design and construction.<br/>Microlithography.<br/>Photoresists.
<br/><br/><label>LC Class. No.: </label>TK7874  / .E495 1986 
<br/><br/><label>Dewey Class. No.: </label>621.381/73�19