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Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 / editor, G.W. Rubloff.

Contributor(s): Rubloff, G. W | American Institute of Physics.
Material type: materialTypeLabelBookSeries: American Vacuum Society series ; 4. AIP conference proceedings: no. 167.Publisher: New York : American Institute of Physics, 1988Description: 388 p. : ill.ISBN: 0883183676.Subject(s): Thin films | Microelectronics -- Materials
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Item type Current location Home library Collection Shelving location Call number Status Date due Barcode
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Matheson Library
Main Collection Main Collection 621.381 D422 (Browse shelf) Available 072417

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