Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 /
editor, G.W. Rubloff.
- New York : American Institute of Physics, 1988.
- 388 p. : ill.
- American Vacuum Society series ; 4 .
- American Institute of Physics conference proceedings ; no. 167 .
- AIP conference proceedings. no. 167. .
0883183676
90011068
Thin films.
Microelectronics--Materials.
0883183676
90011068
Thin films.
Microelectronics--Materials.